Flexible, large-area metamaterials fabricated on thin silicon nitride membranes

TitleFlexible, large-area metamaterials fabricated on thin silicon nitride membranes
Publication TypeJournal Article
Year of Publication2008
AuthorsXG Peralta, CL Arrington, MC Wanke, I Brener, JD Williams, E Smirnova, AJ Taylor, JF O'Hara, A Strikwerda, RD Averitt, and WJ Padilla
JournalOptics InfoBase Conference Papers
Date Published01/2008
Abstract

We present terahertz metamaterials fabricated on large-area, free-standing thin (≤1 μm) silicon nitride membranes with the aim of reducing dielectric losses, enhancing metamaterial sensing capabilities, and enabling flexible and conformable designs. © 2008 Optical Society of America.

Short TitleOptics InfoBase Conference Papers