Mems and metamaterial-based terahertz detector

TitleMems and metamaterial-based terahertz detector
Publication TypeJournal Article
Year of Publication2012
AuthorsH Tao, EA Kadlec, AC Strikwerda, K Fan, WJ Padilla, RD Averitt, EA Shaner, and X Zhang
JournalTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop
Start Page320
Pagination320 - 323
Date Published01/2012
Abstract

We have designed, fabricated and characterized metamaterials-based far-infrared detector. The detector design, which combines metamaterials (MMs) and MEMS, is frequency selective. The enhanced absorption on the cantilever pixels from split-ring resonators (SRRs) leads to a mechanical deflection which is directly detected with a He-Ne beam. As a demonstration of our first-generation devices, we have fabricated and tested detectors at 95 GHz and 693 GHz with noise equivalent powers (NEP) of 10-8 W/Hz1/2 and single-pixel responsivity as high as 16,500 V/W in a room-temperature and pressure environment.

DOI10.31438/trf.hh2012.85
Short TitleTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop