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Title | Mems and metamaterial-based terahertz detector |
Publication Type | Journal Article |
Year of Publication | 2012 |
Authors | H Tao, EA Kadlec, AC Strikwerda, K Fan, WJ Padilla, RD Averitt, EA Shaner, and X Zhang |
Journal | Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop |
Start Page | 320 |
Pagination | 320 - 323 |
Date Published | 01/2012 |
Abstract | We have designed, fabricated and characterized metamaterials-based far-infrared detector. The detector design, which combines metamaterials (MMs) and MEMS, is frequency selective. The enhanced absorption on the cantilever pixels from split-ring resonators (SRRs) leads to a mechanical deflection which is directly detected with a He-Ne beam. As a demonstration of our first-generation devices, we have fabricated and tested detectors at 95 GHz and 693 GHz with noise equivalent powers (NEP) of 10-8 W/Hz1/2 and single-pixel responsivity as high as 16,500 V/W in a room-temperature and pressure environment. |
DOI | 10.31438/trf.hh2012.85 |
Short Title | Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop |